Equipment for Electronic Device Manufacturing and for R&D
PVD Equipment for R&D EB1000 | PVD Equipment for R&D/Small-Scale Production EB1100 | PVD Equipment for Small-Scale Production EC7000 Series |
PVD Equipment for LED Production EL3000 Series | SiC Electron Bombardment Anneal System (EBAS) EC7200 | PVD Equipment for Electronic Component Production EC7400 |
LED PVD Equipment EC8100 | Inline Type PVD Equipment for Electronic Component Production EL3200 | Advanced Packaging High Productivity PVD Equipment EL3400 |